Piezo / Pirani, absolute pressure 1200 - 1.0e-4 mbar and relative pressure -1260 ... +940 mbar, metal sealed, DN16KF, EtherCAT
Piezo / Pirani, absolute pressure 1200 - 1.0e-4 mbar and relative pressure -1260 ... +940 mbar, metal sealed, DN16KF, EtherCAT
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The vacuum transducer VSL has been developed especially for loadlocks. The metal sealed gauge uses a multi sensor technology and combines two piezos with a Pirani sensor. Therefore, the vacuum transducer measures absolute pressure in the range of 1200 …1e-4 mbar as well as relative pressure in relation to the environment in the range of -1060 … +340 mbar.
The VSL is available in KF and CF variations and with different interfaces.
Product code: VSL53EShipping and Payment
983 EUR excl. VAT 1 189,43 EUR incl. VAT
![Thyracont Thyracont](https://activair-cz.s15.cdn-upgates.com/_cache/a/c/acf4fa950141eb2c1abc505aa023a6bc-thyracont-logo.png)
The vacuum transducer VSL has been developed especially for loadlocks. The metal sealed gauge uses a multi sensor technology and combines two piezos with a Pirani sensor. Therefore, the vacuum transducer measures absolute pressure in the range of 1200 …1e-4 mbar as well as relative pressure in relation to the environment in the range of -1060 … +340 mbar.
The VSL is available in KF and CF variations and with different interfaces.
Product code: VSL53EShipping and Payment
Measurement principles | Combination sensors, Piezo, Pirani |
---|---|
Gas dependency | depending on gas type, independent of gas type (Piezo) |
Measuring range mbar | -1060 … +340 mbar (rel.), 0-10V Output |
Measurement range Torr | 900 – 1e-4 Torr, Relative pressure: -795 … +255 Torr |
Max, Overpressure resistance | 4 bar abs. |
Accuracy | 1200 – 40 mbar: 0.3 % f.s. | 40 – 2e-3 mbar: 10 % f.r. |
Response time | 40 ms |
Repeatability | 1200 – 40 mbar: 0.1% f.s. | 40 – 1e-2 mbar: 2 % f.r. |
Materials in contact with vacuum | Stainless steel 1.4307, tungsten, nickel, glass, gold, silicon oxide |
Operating temperature | +5…+60 °C |
Storage temperature | -40…+65 °C |
Voltage supply | 20 – 30 VDC |
Serial interface | RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity |
Article Number (choice of vacuum connection) | DN 16 CF-F (VSL54), DN 16 ISO-KF (VSL53) |
Dimensions | 99 x 69 x 48 mm (VSL53) |
Protection class | IP54 |
Weight (kg) | 0,125 |
Category | Vacuum transducer |
Serial interfaces | EtherCAT, RS485 |
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Piezo / Pirani, absolute pressure 1200 - 1.0e-4 mbar and relative pressure -1260 ... +940 mbar, metal sealed, DN16KF, EtherCAT
1 189,43 EUR incl. VAT