Piezo / Pirani, absolute pressure 1200 - 1.0e-4 mbar and relative pressure -1260 ... +940 mbar, metal sealed, DN16CF, Profinet


Thyracont

The vacuum transducer VSL (with profinet) has been developed especially for loadlocks. The metal sealed gauge uses a multi sensor technology and combines two piezos with a Pirani sensor. Therefore, the vacuum transducer measures absolute pressure in the range of 1200 …1e-4 mbar as well as relative pressure in relation to the environment in the range of -1060 … +340 mbar.
The VSL is available in KF and CF variations and with different interfaces.

Product code: VSL54PNShipping and Payment

916 EUR excl. VAT 1 108,36 EUR incl. VAT

Not in stock (5-7 days) Watch availability - if the goods are not in stock, we normally deliver them in the usual quantity within 7 days from the date of receipt of the order
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Thyracont

The vacuum transducer VSL (with profinet) has been developed especially for loadlocks. The metal sealed gauge uses a multi sensor technology and combines two piezos with a Pirani sensor. Therefore, the vacuum transducer measures absolute pressure in the range of 1200 …1e-4 mbar as well as relative pressure in relation to the environment in the range of -1060 … +340 mbar.
The VSL is available in KF and CF variations and with different interfaces.

Product code: VSL54PNShipping and Payment

Parameters
Measurement principles Piezo, Pirani
Measuring range mbar -1060 … +340 mbar (rel.), 0-10V Output
Measurement range Torr 900 – 1e-4 Torr, Relative pressure: -795 … +255 Torr
Max, Overpressure resistance 4 bar abs.
Accuracy 1200 – 40 mbar: 0.3 % f.s. | 40 – 2e-3 mbar: 10 % f.r., Relative pressure: 0,25 % f. span
Response time 40 ms
Repeatability 1200 – 40 mbar: 0.1% f.s. | 40 – 1e-2 mbar: 2 % f.r.
Materials in contact with vacuum Stainless steel 1.4307, tungsten, nickel, glass, gold, silicon oxide
Operating temperature +5…+50°C (Profinet)
Storage temperature -40…+65 °C
Voltage supply 20 – 30 VDC
Serial interface RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity
Electrical connection 1x M12 A / 2x M12 D, female
Article Number (choice of vacuum connection) DN 16 CF-F (VSL54), DN 16 ISO-KF (VSL53)
Dimensions 99 x 69 x 48 mm (VSL53)
Protection class IP54
Serial interface RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity
Category Vacuum transducer
Serial interfaces Profinet, RS485