Piezo / Pirani, absolute pressure 1200 - 1.0e-4 mbar and relative pressure -1260 ... +940 mbar, metal sealed, DN16CF :: Activair

Piezo / Pirani, absolute pressure 1200 - 1.0e-4 mbar and relative pressure -1260 ... +940 mbar, metal sealed, DN16CF

The vacuum transducer VSL has been developed especially for loadlocks. The metal sealed gauge uses a multi sensor technology and combines two piezos with a Pirani sensor. Therefore, the vacuum transducer measures absolute pressure in the range of 1200 …1e-4 mbar as well as relative pressure in relation to the environment in the range of -1060 … +340 mbar.
The VSL is available in KF and CF variations and with different interfaces.

Product code: VSL54DShipping and Payment

676 EUR excl. VAT 817,96 EUR incl. VAT

Product code: VSL54DShipping and Payment

Parameters

Measurement principles	Combination sensors, Piezo, Pirani
Gas dependency	depending on gas type, independent of gas type (Piezo)
Measuring range mbar	-1060 … +340 mbar (rel.), 0-10V Output
Measurement range Torr	900 – 1e-4 Torr, Relative pressure: -795 … +255 Torr
Max, Overpressure resistance	4 bar abs.
Accuracy	1200 – 40 mbar: 0.3 % f.s. \| 40 – 2e-3 mbar: 10 % f.r., Relative pressure: 0,25 % f. span
Materials in contact with vacuum	Stainless steel 1.4307, tungsten, nickel, glass, gold, silicon oxide
Operating temperature	+5…+60 °C
Storage temperature	-40…+65 °C
Voltage supply	20 – 30 VDC
Serial interface	RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity
Electrical connection	SubD 15pole, male
Article Number (choice of vacuum connection)	DN 16 CF-F (VSL54), DN 16 ISO-KF (VSL53)
Dimensions	25 × 16 × 9 cm
Protection class	IP40, IP54 mit connector XB15SL05
Weight (kg)	195 g (VSL53)
Category	Vacuum transducer
Output signal	0-10 V
Serial interfaces	RS485