Piezo / Pirani, 1200-1e-4 mbar, metal sealed, DN16KF, Profinet
Piezo / Pirani, 1200-1e-4 mbar, metal sealed, DN16KF, Profinet

The combination of piezo and Pirani sensor in the digital VSR vacuum transducer ensures high precision and excellent resolution in the rough and fine vacuum range.
Product code: VSR53PNShipping and Payment
912 EUR excl. VAT 1 103,52 EUR incl. VAT

The combination of piezo and Pirani sensor in the digital VSR vacuum transducer ensures high precision and excellent resolution in the rough and fine vacuum range.
Product code: VSR53PNShipping and Payment
Parameters
Measurement principles | Combination sensors, Piezo, Pirani |
---|---|
Gas dependency | depending on gas type, independent of gas type (Piezo) |
Measuring range mbar | 0-10V Output |
Measurement range Torr | 900 – 1e-4 Torr |
Max, Overpressure resistance | 4 bar abs. |
Accuracy | 1200 – 40 mbar: 0.3 % f.s. | 40 – 2e-3 mbar: 10 % f.r. |
Response time | 40 ms |
Repeatability | 1200 – 40 mbar: 0.1% f.s. | 40 – 1e-2 mbar: 2 % f.r. |
Materials in contact with vacuum | Stainless steel 1.4307, tungsten, nickel, glass, gold, silicon oxide |
Operating temperature | +5…+50°C (Profinet) |
Storage temperature | -40…+65 °C |
Voltage supply | 20 – 30 VDC |
Serial interface | RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity |
Electrical connection | 1x M12 A / 2x M12 D, female |
Article Number (choice of vacuum connection) | DN 16 CF-F (VSR54), DN 16 ISO-KF (VSR53) |
Dimensions | 99 x 69 x 48 mm (VSR53) |
Protection class | IP54 |
Weight (kg) | 195 g (VSR53) |
Power consumption | Max. 2.5 W, add. 0.8 W f. EtherCAT/relays/ LCD, add. 1.6 W for Profinet |
Category | Vacuum transducer |
Serial interfaces | Profinet, RS485 |
Download
man_vsrE-vcrE.pdf (pdf, 8.8 MB)
VSR-SL-vacuum-transducer-Piezo-Pirani-en.pdf (pdf, 1.7 MB)
man_vsr-vcr.pdf (pdf, 13.3 MB)
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Piezo / Pirani, 1200-1e-4 mbar, metal sealed, DN16KF, Profinet
Not in stock (5-7 days)
912 EUR excl. VAT
1 103,52 EUR incl. VAT
1 103,52 EUR incl. VAT