Piezo / Pirani, 1200-1e-4 mbar, metal sealed, DN16KF, EtherCAT
Piezo / Pirani, 1200-1e-4 mbar, metal sealed, DN16KF, EtherCAT

The combination of piezo and Pirani sensor in the digital VSR vacuum transducer ensures high precision and excellent resolution in the rough and fine vacuum range
Product code: VSR53EShipping and Payment
927 EUR excl. VAT 1 121,67 EUR incl. VAT

The combination of piezo and Pirani sensor in the digital VSR vacuum transducer ensures high precision and excellent resolution in the rough and fine vacuum range
Product code: VSR53EShipping and Payment
Parameters
Measurement principles | Combination sensors, Piezo, Pirani |
---|---|
Gas dependency | depending on gas type, independent of gas type (Piezo) |
Measuring range mbar | 0-10V Output |
Measurement range Torr | 900 – 1e-4 Torr |
Max, Overpressure resistance | 4 bar abs. |
Accuracy | 1200 – 40 mbar: 0.3 % f.s. | 40 – 2e-3 mbar: 10 % f.r. |
Response time | 40 ms |
Repeatability | 1200 – 40 mbar: 0.1% f.s. | 40 – 1e-2 mbar: 2 % f.r. |
Materials in contact with vacuum | Stainless steel 1.4307, tungsten, nickel, glass, gold, silicon oxide |
Operating temperature | +5…+60 °C |
Storage temperature | -40…+65 °C |
Voltage supply | 20 – 30 VDC |
Serial interface | RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity |
Electrical connection | 1x M12 A / 2x M12 D, female |
Article Number (choice of vacuum connection) | DN 16 CF-F (VSR54), DN 16 ISO-KF (VSR53) |
Dimensions | 99 x 69 x 48 mm (VSR53) |
Protection class | IP54 |
Weight (kg) | 195 g (VSR53) |
Category | Vacuum transducer |
Serial interfaces | EtherCAT, RS485 |
Download
man_vsrE-vcrE.pdf (pdf, 8.8 MB)
VSR-SL-vacuum-transducer-Piezo-Pirani-en.pdf (pdf, 1.7 MB)
man_vsr-vcr.pdf (pdf, 13.3 MB)
Last visited (1)


Last visited1
Quick info


Piezo / Pirani, 1200-1e-4 mbar, metal sealed, DN16KF, EtherCAT
Not in stock (5-7 days)
927 EUR excl. VAT
1 121,67 EUR incl. VAT
1 121,67 EUR incl. VAT