Piezo / Pirani, 1200-1e-4 mbar, metal sealed, DN16KF, EtherCAT


Thyracont

The combination of piezo and Pirani sensor in the digital VSR vacuum transducer ensures high precision and excellent resolution in the rough and fine vacuum range

Product code: VSR53EShipping and Payment

826 EUR excl. VAT 999,46 EUR incl. VAT

Not in stock (5-7 days) Watch availability - if the goods are not in stock, we normally deliver them in the usual quantity within 7 days from the date of receipt of the order
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Thyracont

The combination of piezo and Pirani sensor in the digital VSR vacuum transducer ensures high precision and excellent resolution in the rough and fine vacuum range

Product code: VSR53EShipping and Payment

Parameters
Measurement principles Combination sensors, Piezo, Pirani
Gas dependency depending on gas type, independent of gas type (Piezo)
Measuring range mbar 0-10V Output
Measurement range Torr 900 – 1e-4 Torr
Max, Overpressure resistance 4 bar abs.
Accuracy 1200 – 40 mbar: 0.3 % f.s. | 40 – 2e-3 mbar: 10 % f.r.
Response time 40 ms
Repeatability 1200 – 40 mbar: 0.1% f.s. | 40 – 1e-2 mbar: 2 % f.r.
Materials in contact with vacuum Stainless steel 1.4307, tungsten, nickel, glass, gold, silicon oxide
Operating temperature +5…+60 °C
Storage temperature -40…+65 °C
Voltage supply 20 – 30 VDC
Serial interface RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity
Electrical connection 1x M12 A / 2x M12 D, female
Article Number (choice of vacuum connection) DN 16 CF-F (VSR54), DN 16 ISO-KF (VSR53)
Dimensions 99 x 69 x 48 mm (VSR53)
Protection class IP54
Weight (kg) 195 g (VSR53)
Category Vacuum transducer
Serial interfaces EtherCAT, RS485