Piezo / Pirani, 1200-1e-4 mbar, metal sealed, DN16KF :: Activair

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Piezo / Pirani, 1200-1e-4 mbar, metal sealed, DN16KF

The combination of piezo and Pirani sensor in the digital VSR vacuum transducer offers high precision and excellent resolution in the rough and fine vacuum range.

Product code: VSR53DShipping and Payment

607 EUR excl. VAT 734,47 EUR incl. VAT

The combination of piezo and Pirani sensor in the digital VSR vacuum transducer offers high precision and excellent resolution in the rough and fine vacuum range.

Product code: VSR53DShipping and Payment

Parameters

Measurement principles	Combination sensors, Piezo, Pirani
Gas dependency	depending on gas type, independent of gas type (Piezo)
Measuring range mbar	0-10V Output
Measurement range Torr	900 – 1e-4 Torr
Max, Overpressure resistance	4 bar abs.
Accuracy	1200 – 40 mbar: 0.3 % f.s. \| 40 – 2e-3 mbar: 10 % f.r.
Response time	40 ms
Repeatability	1200 – 40 mbar: 0.1% f.s. \| 40 – 1e-2 mbar: 2 % f.r.
Materials in contact with vacuum	Stainless steel 1.4307, tungsten, nickel, glass, gold, silicon oxide
Operating temperature	+5…+60 °C
Storage temperature	-40…+65 °C
Voltage supply	20 – 30 VDC
Serial interface	RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity
Electrical connection	SubD 15pole, male
Article Number (choice of vacuum connection)	DN 16 CF-F (VSR54), DN 16 ISO-KF (VSR53)
Dimensions	99 x 69 x 48 mm (VSR53)
Protection class	IP40, IP54 mit connector XB15SL05
Weight (kg)	195 g (VSR53)
Serial interface	RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity
Switching output	2x relay, pot. free, 50 VAC / 2 Aor 30 VDC / 2 A, max. 60 VA, except EtherCAT and Profinet
Electrical connection	SubD 15pole, male
Category	Vacuum transducer
Output signal	0-10 V
Serial interfaces	RS485

Download

man_vsrE-vcrE.pdf (pdf, 8.8 MB)

VSR-SL-vacuum-transducer-Piezo-Pirani-en.pdf (pdf, 1.7 MB)

man_vsr-vcr.pdf (pdf, 13.3 MB)