Piezo / Pirani, 1200-1e-4 mbar, metal sealed, DN16CF, EtherCAT
Piezo / Pirani, 1200-1e-4 mbar, metal sealed, DN16CF, EtherCAT
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The combination of piezo and Pirani sensor in the digital VSR vacuum transducer ensures high precision and excellent resolution in the rough and fine vacuum range
Product code: VSR54EShipping and Payment
949 EUR excl. VAT 1 148,29 EUR incl. VAT
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The combination of piezo and Pirani sensor in the digital VSR vacuum transducer ensures high precision and excellent resolution in the rough and fine vacuum range
Product code: VSR54EShipping and Payment
Parameters
Measurement principles | Combination sensors, Piezo, Pirani |
---|---|
Gas dependency | depending on gas type, independent of gas type (Piezo) |
Measuring range mbar | 0-10V Output |
Measurement range Torr | 900 – 1e-4 Torr |
Max, Overpressure resistance | 4 bar abs. |
Accuracy | 1200 – 40 mbar: 0.3 % f.s. | 40 – 2e-3 mbar: 10 % f.r. |
Response time | 40 ms |
Repeatability | 1200 – 40 mbar: 0.1% f.s. | 40 – 1e-2 mbar: 2 % f.r. |
Materials in contact with vacuum | Stainless steel 1.4307, tungsten, nickel, glass, gold, silicon oxide |
Operating temperature | +5…+60 °C |
Storage temperature | -40…+65 °C |
Voltage supply | 20 – 30 VDC |
Serial interface | RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity |
Electrical connection | 1x M12 A / 2x M12 D, female |
Article Number (choice of vacuum connection) | DN 16 CF-F (VSR54), DN 16 ISO-KF (VSR53) |
Dimensions | 99 x 69 x 48 mm (VSR53) |
Protection class | IP54 |
Weight (kg) | 195 g (VSR53) |
Category | Vacuum transducer |
Serial interfaces | EtherCAT, RS485 |
Download
man_vsrE-vcrE.pdf (pdf, 8.8 MB)
VSR-SL-vacuum-transducer-Piezo-Pirani-en.pdf (pdf, 1.7 MB)
man_vsr-vcr.pdf (pdf, 13.3 MB)
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Piezo / Pirani, 1200-1e-4 mbar, metal sealed, DN16CF, EtherCAT
Not in stock (5-7 days)
949 EUR excl. VAT
1 148,29 EUR incl. VAT
1 148,29 EUR incl. VAT