Hot cathode / Pirani, 1000-5e-10 mbar, metal sealed, DN40CF, EtherCAT
Hot cathode / Pirani, 1000-5e-10 mbar, metal sealed, DN40CF, EtherCAT
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The digital combination vacuum transducer VSH (Pirani/hot cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
Product code: VSH89EShipping and Payment
1 585 EUR excl. VAT 1 917,85 EUR incl. VAT
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The digital combination vacuum transducer VSH (Pirani/hot cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
Product code: VSH89EShipping and Payment
Parameters
Measurement principles | Combination sensors, Bayard Alpert/Hot Cathode |
---|---|
Gas dependency | depending on gas type |
Measuring range mbar | 1000 - 5e-10 mbar |
Measurement range Torr | 750 – 5.0e-10 Torr |
Measuring range Torr | 750 - 5.0e-10 Torr |
Max, Overpressure resistance | 4 bar abs. |
Accuracy | 1000 … 10 mbar: ca. 30 % f. r. | 10 … 1e-8 mbar: 10 % f. r. |
Response time | 50 ms (switching of emission current |
Repeatability | 10 – 1e-2 mbar: 2 % f. r. | 1e-2 – 1e-8 mbar: 5% f. r. |
Materials in contact with vacuum | Stainl. steel 1.4307, tungsten, nickel, glass, platinum, iridium, yttria oxide |
Operating temperature | +5…+60 °C |
Storage temperature | -40…+65 °C |
Voltage supply | 20 – 30 VDC |
Serial interface | RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity |
Electrical connection | 1x M12 A / 2x M12 D, female |
Article Number (choice of vacuum connection) | DN 25 ISO-KF (VSH87), DN 40 CF-F (VSH89), DN 40 ISO-KF (VSH88) |
Dimensions | 141 x 69 x 48 mm (VSH88) |
Protection class | IP54 |
Weight (kg) | 475 g (VSH88) |
Serial interface | RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity |
Bake out temperature | Max. 180°C at the flange (voltage supply switched-off) |
Filaments / anodes | Yttria coated iridium |
Emission current | 9 μA, 100 μA, 1.0 mA, 2,0 mA |
Degas method | Ohmic heating of the anode |
Category | Vacuum transducer |
Serial interfaces | EtherCAT, RS485 |
Download
man_vshE.pdf (pdf, 9.5 MB)
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Hot cathode / Pirani, 1000-5e-10 mbar, metal sealed, DN40CF, EtherCAT
Not in stock (5-7 days)
1 585 EUR excl. VAT
1 917,85 EUR incl. VAT
1 917,85 EUR incl. VAT