Hot cathode / Pirani, 1000-5e-10 mbar, metal sealed, DN25KF, EtherCAT :: Activair

Hot cathode / Pirani, 1000-5e-10 mbar, metal sealed, DN25KF, EtherCAT

The digital combination vacuum transducer VSH (Pirani/hot cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum.

1 550 EUR excl. VAT 1 875,50 EUR incl. VAT

The digital combination vacuum transducer VSH (Pirani/hot cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum.

Parameters

Measurement principles	Combination sensors, Bayard Alpert/Hot Cathode
Gas dependency	depending on gas type
Measuring range mbar	1000 - 5e-10 mbar
Measurement range Torr	750 – 5.0e-10 Torr
Measuring range Torr	750 - 5.0e-10 Torr
Max, Overpressure resistance	4 bar abs.
Accuracy	1000 … 10 mbar: ca. 30 % f. r. \| 10 … 1e-8 mbar: 10 % f. r.
Response time	50 ms (switching of emission current
Repeatability	10 – 1e-2 mbar: 2 % f. r. \| 1e-2 – 1e-8 mbar: 5% f. r.
Materials in contact with vacuum	Stainl. steel 1.4307, tungsten, nickel, glass, platinum, iridium, yttria oxide
Operating temperature	+5…+60 °C
Storage temperature	-40…+65 °C
Voltage supply	20 – 30 VDC
Serial interface	RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity
Electrical connection	1x M12 A / 2x M12 D, female
Article Number (choice of vacuum connection)	DN 25 ISO-KF (VSH87), DN 40 CF-F (VSH89), DN 40 ISO-KF (VSH88)
Dimensions	141 x 69 x 48 mm (VSH88)
Protection class	IP54
Weight (kg)	475 g (VSH88)
Serial interface	RS485: 9.6 kBd to 115 kBd, 8 databit, 1 stopbit, no parity
Bake out temperature	Max. 180°C at the flange (voltage supply switched-off)
Filaments / anodes	Yttria coated iridium
Emission current	9 μA, 100 μA, 1.0 mA, 2,0 mA
Degas method	Ohmic heating of the anode
Category	Vacuum transducer
Serial interfaces	EtherCAT, RS485

Download

man_vshE.pdf (pdf, 9.5 MB)